This technique can only be used for surface analysis if the amount of the bulk material
is small enough. Plasma deposited layers have been analyzed on potassium chloride pellets.
Special thin film samples (some 10 nm thick) permit to analyze also surface alterations
created by a low pressure plasma.
In the surface modification group of the IAP a Bruker IFS 28 is used for in-situ-IRRAS
measurements in the UHV-plasma chamber.