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The modular plasma reactor. All components (pumping unit, gas supply, RF generator and tuner) are mounted in a 19 inch rack. |
The reactor was designed to minimize memory effects which are often observed when
different types of plasma treatments are done in one reactor. This system is made of
exchangeable parts. The heart of it is a pyrex tube with 16 cm inner diameter. For every
type of process a tube is used which is dedicated only to this particular treatment type.
All other parts can be cleaned easily by sand paper.
The RF power is coupled into the glass tube via two copper ring electrodes. The sample
holder hangs down to the bottom in order to avoid the deposition of powdery product from
the plasma. It can be placed at different position in the system.
